Chemical Usage Reduction Through The Use Of Real Time Monitoring
13 May, 2015
A closed loop control based on real time monitoring using WetSpec200 analyzer, allowed the extention of SC1 bath lifetime from 4 hours to 24 hours.
WetSpec200 - 化学浴监测
30 April, 2015
Translation to Chinese of the article " Monitoring Recirculated baths using WetSpec200"
Monitoring Recirculated baths using WetSpec200
Specialized chemical mixtures used in semiconductor processing are necessary for the surface preparation of wafers. As little as 1% error in the dilution ratio can degrade yield in a sensitive process, both for acids for organic solvents that contain water as a component required for the removal of etch residuals….