The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

Near Infrared (NIR) Spectroscopy

NIR Process Analyzing

Near Infrared (NIR) spectroscopy involves projecting a NIR light source at or through a target, measuring the transmitted or reflected light, as function of wavelength. The resulting spectral array carries rich information with regard to physical and chemical properties of the measured target. This technology is being used for measuring various properties of the target.

Typical applications used in the semiconductors manufacturing market are: analyzing concentrations of multiple-component liquids using chemometrics algorithms, measuring temperature of wafers, and layer thickness measurement.