The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

Deposition

Deposition Processes Temperature Monitoring Solutions

Deposition processes include such steps as PVD (Physical vapor deposition, metallization) and CVD (chemical vapor deposition – dielectrics, tungsten). Some of these processes are very temperature sensitive and require accurate temperature measurement and control. The NTM Delta is the market standard for an accurate in-situ temperature sensor in a variety of deposition applications:

  • PVD (Physical Vapor Deposition)
  • CVD (Chemical Vapor Deposition)
  • HDP-CVD (High Density Plasma CVD)
  • PE-CVD (Plasma enhanced CVD)
  • and more...

Deposition Processes Temperature Measurement & Control Equipment