The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

Deposition

Deposition processes include such steps as PVD (Physical vapor deposition, metallization) and CVD (chemical vapor deposition – dielectrics, tungsten). Some of these processes are very temperature sensitive and require accurate temperature measurement and control. The NTM Delta is the market standard for an accurate in-situ temperature sensor in a variety of deposition applications:

  • PVD (Physical Vapor Deposition)
  • CVD (Chemical Vapor Deposition)
  • HDP-CVD (High Density Plasma CVD)
  • PE-CVD (Plasma enhanced CVD)
  • and more...