Deposition processes include such steps as PVD (Physical vapor deposition, metallization) and CVD (chemical vapor deposition – dielectrics, tungsten). Some of these processes are very temperature sensitive and require accurate temperature measurement and control. The NTM Delta is the market standard for an accurate in-situ temperature sensor in a variety of deposition applications:
- PVD (Physical Vapor Deposition)
- CVD (Chemical Vapor Deposition)
- HDP-CVD (High Density Plasma CVD)
- PE-CVD (Plasma enhanced CVD)
- and more...
Deposition Processes Temperature Measurement & Control Equipment