The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

NTM Eta

The NTM-ETA is an advanced high accuracy and repeatability pyrometer designed to operate as a stand-alone unit or in conjunction with the NTM-Delta emissivity independent pyrometer. 
The emissivity for the temperature calculation can be entered directly from the NTM-Delta or via serial communication from a host computer

The high sensitivity and broad dynamic range of the NTM-ETA  allows low minimum temperatures to be accurately measured

Based on the state-of-the-art technology of the NTM-Delta, with thousands of installations worldwide, the NTM-ETA is a reliable low-cost solution for in situ non-contact temperature monitoring in PVD, HDP-CVD, RTP and other processes.

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Features & BenefitsKey Specifications
  • In situ, non-contact monitoring
  • Real-time measurement
  • High sensitivity with a broad dynamic range to allow minimal temperature measurement
  • Small footprint
  • Rapid update rate (up to 3,000 Hz) for closed loop control
  • Advanced communication protocols including LAN, RS232 and standard analog and digital I/O
  • Background compensation customized to each OEM process environment
  • BIT (Built-In Test)
  • Optional optical interfaces available, including remote optics
  • Optional embedded PID controller
  • Advanced, user friendly s/w for set-up, calibration and data-logging

Temperature range:

Total Range 25°C - 2,000°C

Different models available, optimized for specific applications

Accuracy

25°C - 500°C: ± 0.8°C
500°C - 2,000°C: ± 0.15%T

Repeatability

± 0.1°C

Resolution:

0.01°C

Update rate

Up to 3,000 Hz

Communication

RS232, Ethernet

Dimensions

213x100x46 mm (without fiber)
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