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Pyrometer: How Does It Work & Equipment

A pyrometer is a non contact sensor, providing the temperature of targets by measuring their thermal radiation.

Every object emits thermal radiation, the amount of which is a function of its temperature and emissivity. By measuring the radiation emitted by a target, such as a semiconductor wafer, its temperature can be calculated.

For accurate temperature measurement, it is also required that the emissivity of the target is known – this can either be measured in real time or provided as a theoretical based input. Semiconductor wafer temperature measurement solutions >>

Pyrometers & Equipment