A pyrometer is a non contact sensor, providing the temperature of targets by measuring their thermal radiation.
Every object emits thermal radiation, the amount of which is a function of its temperature and emissivity. By measuring the radiation emitted by a target, such as a semiconductor wafer, its temperature can be calculated.
For accurate temperature measurement, it is also required that the emissivity of the target is known – this can either be measured in real time or provided as a theoretical based input. Semiconductor wafer temperature measurement solutions >>
Pyrometers & Equipment