The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years


Whether you have an urgent problem or a simple question, we're here to help you by web or phone.

  • Ask for service
    Whether it is installation and configuration assistance or technical support with any of our products.You may find the quickest way to open a support case with us is to use our online web portal.
    Click here to open a support case.
  • Product support
    Our technical support teams stand ready to assist you with all of your technical questions.
    CI Systems support is located across the globe to provide you with assistance.
    Click here to contact a local CI Semi representative or click here to send us an email.
  • US technical and service center
    Phone: (650) 424-0682
    Hours: 7 a.m. to 5 p.m. Mondays thru Fridays PST
    Click here to open a support case

  • Tell us what you think
    We welcome and appreciate your feedback on our products and services.
    Click here to leave your comments.

  • Legal notes
    Read CI Systems warranty policy
    Read CI Systems commitment to user privacy
    Read CI Systems' website terms of use.

For additional assistance or if the above resources do not answer your questions, please feel free to contact us.
Our team will be able to work with you to find a tailored solution to your particular problem or concern.