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The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years
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Superior Concentration Measurement Stability: Introducing FlowCell+
9/12/2018
FlowCell+ New Self-Calibrating, High Stability Flow Cell for Concentration Monitoring (Patent Pending) Features FlowCell+ provides significantly improved measurement capabilities at lower concentrations. Self-calibration design means longer time between calibrations - increases tool up-time. Some applications are Plug and Play - No calibration needed after installation or after periodic lamp replacement. Improved immunity to environmental and flow cell temperature changes. Compatible with WetSpec concentration monitors. Specifications Fluid temperature up to 75 °C (higher temperatures on request). Wetted materials - Sapphire, TFM-PTFE and FFKM O-rings. Standard ¼” Flaretek ® fittings for easy installation (other fitting types and sizes on request). Air activated - requires 2 Atm CDA supply.
CI SEMI IL