The NTM-LW is compact long-wave radiometer, capable of measuring temperature of liquid layers on a wafer (single wafer wet process), glass panels (flat screen, touch screen, solar panels, etc.), low-resistivity silicon (<1 Ohm-cm) and other opaque objects.
Probe setup and data logging is possible using the supplied user-friendly control and data-logging software, or using RS232/RS485/USB 2.0 communications protocol implemented by the customer. Data can also be output via two analog output channels.
Unique Features
Background Subtraction
The general purpose input/output channel of the NTM-LW can be used to transfer measurements from one NTM-LW to other probes within a given chamber. This feature can be used, for example, to subtract background radiation from the measurement, by having one probe view directly the background radiation source (for example, a chamber wall which is slowly heating up), and pass the measured background radiation level to other NTM-LW probes in the same chamber. The probes receiving the background signal level can then correct their readings by subtracting the background signal level from their measurements.
Tool-to-tool Matching
Calibration routines in the control and data-logging software allow the operator to match the probe reading to a given reference source. Alternately, customer-specific calibration routines can be implemented to allow calibration of the probe based on process data results. These calibration features can improve process uniformity across the wafer and process matching between tools.
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