The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years

NTM-LW Pyrometer

The NTM-LW is compact long-wave radiometer, capable of measuring temperature of liquid layers on a wafer (single wafer wet process), glass panels (flat screen, touch screen, solar panels, etc.), low-resistivity silicon (<1 Ohm-cm) and other opaque objects.  

Probe setup and data logging is possible using the supplied user-friendly control and data-logging software, or using RS232/RS485/USB 2.0 communications protocol implemented by the customer.  Data can also be output via two analog output channels.

Unique Features


Background Subtraction

The general purpose input/output channel of the NTM-LW can be used to transfer measurements from one NTM-LW to other probes within a given chamber.  This feature can be used, for example, to subtract background radiation from the measurement, by having one probe view directly the background radiation source (for example, a chamber wall which is slowly heating up), and pass the measured background radiation level to other NTM-LW probes in the same chamber.  The probes receiving the background signal level can then correct their readings by subtracting the background signal level from their measurements. 
 

Tool-to-tool Matching

Calibration routines in the control and data-logging software allow the operator to match the probe reading to a given reference source.   Alternately, customer-specific calibration routines can be implemented to allow calibration of the probe based on process data results.  These calibration features can improve process uniformity across the wafer and process matching between tools.

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Specifications

Temperature range

0 to 800°C (standard, other ranges per application requirements)

Repeatability

1°C or 1% of °C reading, whichever is larger

Condition: Ambient 18-28°C, target emissivity 1

Temperature noise

0.05°C + abs(T-50°C)/5000

one standard deviation, target emissivity = 1, update rate 2Hz.

Response time (63%)

0.005 seconds at 960Hz update rate setting

Measurement rate

1 to 960Hz, user configurable using supplied PC-based control & data-logging software

Analog outputs

2 analog output channels, each configurable to any one of:

4-20mA, 0-20mA, 0-5V, 0-10V

Analog input

One channel, user configurable to any one of:

0-20mA, 4-20mA, 0-5V, 0-10V

Digital output

One optocoupler isolated output

Digital input

One optocoupler 24V isolated

General purpose input/output channel

5V level input, non-isolated open collector.

Communication

One of RS232 or USB 2.0 (user selectable via software). Supplied with PC-based control & data-logging program, as well as general communication command protocol.

(RS485 ready)

Power supply

18-32 VDC, 5Watt

Dimensions

Sensor head: 14mm diameter x 45mm long.

M12x1 threading on front 8mm of sensing head.

Controller: 95mm x 160mm x 36mm

Standard head-to-controller cable length = 2m.  Other lengths per customer specification.

Spot size: Hardware configurable (at factory) per application requirements:

Example viewing spot size as function of distance from probe:

 NTM-LW-Spec_20250903105331.902.png

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