The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years
Superior Concentration Measurement Stability: Introducing FlowCell+
CI SEMI IL
9 December, 2018
New Self-Calibrating, High Stability Flow Cell for Concentration Monitoring (Patent Pending)
FlowCell+ provides significantly improved measurement capabilities at lower concentrations.
Self-calibration design means longer time between calibrations - increases tool up-time.
Some applications are Plug and Play - No calibration needed after installation or after periodic lamp replacement.
Improved immunity to environmental and flow cell temperature changes.
Compatible with WetSpec concentration monitors.
Fluid temperature up to 75 °C (higher temperatures on request).
Wetted materials - Sapphire, TFM-PTFE and FFKM O-rings.
Standard ¼” Flaretek ® fittings for easy installation (other fitting types and sizes on request).
Air activated - requires 2 Atm CDA supply.