The leader in In-situ and In-line monitoring of semiconductor processes for more than 20 years
Whether you have an urgent problem or a simple question, we're here to help you by web or phone.
- Ask for service
Whether it is installation and configuration assistance or technical support with any of our products.You may find the quickest way to open a support case with us is to use our online web portal.
Click here to open a support case.
- Product support
Our technical support teams stand ready to assist you with all of your technical questions.
CI Systems support is located across the globe to provide you with assistance.
Click here to contact a local CI Semi representative or click here to send us an email.
- US technical and service center
Phone: (650) 424-0682
Hours: 7 a.m. to 5 p.m. Mondays thru Fridays PST
Click here to open a support case
- Download center
Click here to download ICD drawings
- Tell us what you think
We welcome and appreciate your feedback on our products and services.
Click here to leave your comments.
- Legal notes
Read CI Systems warranty policy
Read CI Systems commitment to user privacy
For additional assistance or if the above resources do not answer your questions, please feel free to contact us.
Our team will be able to work with you to find a tailored solution to your particular problem or concern.