Wet Process Monitoring System
The WetRad2 is an in-line, real-time, non contact concentration meter, using dual wavelength radiometery to enable cost-efficient monitoring of wet process chemicals. With its unique dual wavelength radiometer and by using pre-selected wavelengths, the WetRad2 is optimized to monitor a specific single component within a complex chemical mix.
The WetRad2’s compact design is based on CI's renowned and reliable NTM platform which is installed in thousands of process chambers working 24/7, for the monitoring of semiconductor processes.
When integrated into a control system, the WetRad2 enables tighter process control and identifies process excursions before they affect yield.
Measurement method |
Fiber-optic Dual Wavelength Radiometer |
Wavelength range |
UV/VIS/IR |
Calibration method |
Chemometrics |
Time per measurement |
Up to 10Hz (Application dependent) |
Sample conditioning |
None required |
Temperature compensation |
Automatic and continuous |
Temperature range (chemicals) |
0° to 120°C |
Wetted materials |
Teflon, Sapphire, Kalrez |
Communication |
RS232 / Ethernet, Analog and digital I/O |
Fiberoptic length |
Up to 10m |
Size [mm] |
Controller: 213x100x46 |