WetRad2
Wet Process Monitoring System
The WetRad2 is an in-line, real-time, non contact concentration meter, using dual wavelength radiometery to enable cost-efficient monitoring of wet process chemicals. With its unique dual wavelength radiometer and by using pre-selected wavelengths, the WetRad2 is optimized to monitor a specific single component within a complex chemical mix.
The WetRad2’s compact design is based on CI's renowned and reliable NTM platform which is installed in thousands of process chambers working 24/7, for the monitoring of semiconductor processes.
When integrated into a control system, the WetRad2 enables tighter process control and identifies process excursions before they affect yield.
- Concentration monitoring of a specific single component in a complex mix
- Pre-Selectable dual wavelength (UV/VIS/NIR ) for optimized performance
- Fiber based sensor for easy installation near the point of measurement
- High stability and repeatability by continuous measurement of internal reference signals
- High accuracy
- Small footprint
- Fast measurement time
- Maintenance free - No light source replacement required
- Simple and durable – 365/24/7 non stop
- Standard ¼” to ¾” Flaretek® / Nippon Pillar® fittings for easy installation (For other fitting types please consult CI)
- Ammonia (in a mix)
- Metal Ions in mixed acid etch
- Citric Acid in water
- HF (in a mix)
- Peroxide in water
- Water in solvents
- TMAH in water
- Water in IPA
- Water in Phosphoric Acid * Other chemistries supported per request
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Measurement method |
Fiber-optic Dual Wavelength Radiometer |
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Wavelength range |
UV/VIS/IR |
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Calibration method |
Chemometrics |
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Time per measurement |
Up to 10Hz (Application dependent) |
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Sample conditioning |
None required |
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Temperature compensation |
Automatic and continuous |
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Temperature range (chemicals) |
0° to 120°C |
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Wetted materials |
Teflon, Sapphire, Kalrez |
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Communication |
RS232 / Ethernet, Analog and digital I/O |
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Fiberoptic length |
Up to 10m |
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Size [mm] |
Controller: 213x100x46 |