WetSpec201
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W e t P r o c e s s M o n i t o r i n g
F o r S e m i
c o n d u c t o r, F P D a n d S o l a r c e l l
m a n u f a c t u r i n g
CI -SEMI's in- line, wet process analysis system, the WetSpec201, enables non-contact real - time monitoring and closed- loop control of chemical composition in wet process applications. The WetSpec201 is the single-channel version of the well known WetSpec200 and provides cost-effective, small footprint solution.
The WetSpec201 is ideal for monitoring of cleaning, stripping and etching chemistries. Based on CI -SEMI ?s novel algorithm, the WetSpec201 measures the absorption spectrum in the near infrared (NIR) fast and accurately without labor and material waste. The system?s versatile software models enable soft -switch between different chemistries. When integrated into a control and spiking system, the WetSpec201 enables tighter process control and identifies process excursions before they affect yield.
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F e
a t u r e s a n d B e n e f i t s
- In-line, real-time monitoring of chemical concentration of liquids
- Cost efficient and small footprint
- No need for chemical sampling or dilution
- Short measurement time and low operational costs
- Simple switching between different chemistries
- Analysis of complex (multi-component) chemistries
- Real-time measurement enables closed loop control
- Up to 200 meters distance between analyzer and measuring cell enables placement of the analyzer in a convenient location
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