WetSpec100
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I n - l i n e P r o c e s s A n a l y z e r
CI Semi’s WetSpec100 is a cost effective non-contact in-line monitor of chemical composition of liquids. It can be integrated into applications such as health monitoring of slurries in CMP blending and distribution systems, and monitoring of cleaning, stripping, and other liquids in wet stations.
The system accurately measures the absorption spectrum in the near infrared (NIR) to monitor the chemical composition and other physical properties of liquids.
The WetSpec100 offers several advantages over conventional off-line methods.
Most importantly, the WetSpec100 greatly reduces the turnaround time. Also, no chemicals are needed, and there is no waste to remove. Lastly, WetSpec100 is significantly more cost-effective than any other method in common use. With the capability to monitor up to 8 flow cells in parallel, the WetSpec100 gives you an efficient in-line process monitor with a low cost per channel
When integrated into your control system, the WetSpec 100 will enable tighter process control, and identify process excursions changes before they affect your yield.
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F e a t u r e s a n d B e
n e f i t s
- In-line, real-time characterization and monitoring of chemical composition of liquids
- No need for chemical sampling or diluting
- Short measurement time and low operational costs
- One analyzer can monitor several measuring cells with different chemistries
- Analysis of complex (multi component) chemistries.
- Real time measurement enables closed loop control
- Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient position
| T y p i c a l A p p l i c a t i o n s (Partial list) |
| Application |
Component |
Range |
| Peroxide in Slurry |
H2O2 |
0-5 wt% |
| Ammonium Hydroxide |
NH4OH |
0-5 wt% |
| Citric Acid |
Citric Acid |
0-1.5 wt% |
| SC1 |
NH4OH
H2O2 |
0-1.5 wt%
0-9 wt% |
| SC2 |
HCl
H2O2 |
0-4 wt%
0-8 wt% |
| DSP (Dilute Sulfuric Peroxide) |
H2SO4
H2O2 |
8-13 wt%
2-5 wt% |
| HF/HCl |
HF
HCl |
0-1.2 wt%
0-1.2 wt% |
| HF |
HF |
0-1.2 wt% |
| ST 250 |
H2O |
< 40% |
| EKC 265 |
H2O |
< 30% |
| ACT 970 |
H2O |
< 20% |
| K e y S p e c i f i c a
t i o n s |
| Measurement Method |
Fiber Optic Remote NIR Spectroscopy |
| Calibration Method |
Chemometrics |
| Multiplexing Ability
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Up to 8 measurement channels |
| Time per measurement |
Up to 30 seconds for chemical solutions
Up to 60 seconds for slurries |
| Sample Conditioning |
None required |
| Temperature compensation |
Automatic and continuous |
| Wetted Materials |
PEEK, Sapphire, Kalrez or other approved O-ring material |
| Communications |
RS232 / Analog / Ethernet |
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