Ci-Semi


		NTM Eta
	NTM Delta
SR72
Interfaces

	WetSpec200
		WetSpec201

NTM 500

I n s i t u E m i s s i v i t y I n d e p e n d e n t
N o n - c o n t a c t T e m p e r a t u r e M o n i t o r

The NTM500 is a high accuracy and repeatability pyrometer which incorporates real-time same-point emissivity and temperature measurement.
Background compensation is application depended and utilizes the heater temperature and wafer emissivity as inputs through both hardware emission blocking and software processing.
It measures wafer temperatures in PVD, HDP-CVD, RTP and other processes.

F e a t u r e s a n d B e n e f i t s

In situ, non-contact monitoring.
Real-time, same-point temperature and emissivity measurement and compansation.
Robust quick and vacuum-safe interface to the process chamber through quartz/sapphire light pipe and fiber optic bundle.
Background compensation — built-in solutions to fit each OEM process environment, for full immunity to interfering radiation sources such as plasma or heating elements.
Fast update rate, enabling use for closed loop control for all applications.
Analog and digital outputs, to fit any host interface configuration.
High sensitivity, resulting in low minimum temperature.
Multi-probe operation (RS-485) with either NTM500 or NTM450.
I/O compatibility to PDA's.
Optional optical interfaces are available, including remote optics.
Optional remote control unit with temperature display.

K e y S p e c i f i c a t i o n s
Temperature range: PVD HDP CVD RTP,RTCVD	200-600 °C 250-700 °C 400-1250 °C
Other temperature ranges may be customized according to requirements.
Accuracy	200-500°C ±0.8°C 500-1250°C ±0.15%T
Repeatability (typical)	±0.2°C (typical)
Resolution:	0.01°C
Update rate	30 Hz (100 Hz optional)
Communication	RS-232/RS-485
Dimensions	8.1" x 5.9" x 4.9"