NTM Eta
NTM Delta
SR72
Interfaces
WetSpec200
WetSpec201



NTM 450


I n  s i t u   N o n - c o n t a c t   T e m p e r a t u r e   
M o n i t o r

The NTM450 is an advanced high accuracy and repeatability pyrometer designed to operate as a stand-alone unit or in conjunction with the NTM500 emissivity independent pyrometer.
The emissivity for the temperature calculation can be entered directly from the NTM500 or via serial communication from a host computer.

Based on the state-of-the-art technology of the NTM500, it is a low-cost solution for in situ non-contact temperature monitoring in PVD, HDP-CVD, RTP and other processes. The NTM450 is a highly sensitive temperature monitor and allows temperature measurement from below 200°C.



F e a t u r e s   a n d   B e n e f i t s

  • In situ, non-contact monitoring.
  • Real-time emissivity input from external sources.
  • Robust quick and vacuum-safe interface to the process chamber through quartz/sapphire light pipe and fiber optic bundle.
  • Background compensation — built-in solutions to fit each OEM process environment, for full immunity to interfering radiation sources such as plasma or heating elements.
  • Fast update rate, enabling use for closed loop control for all applications.
  • Analog and digital outputs, to fit any host interface configuration.
  • High sensitivity, resulting in low minimum temperature.
  • Multi-probe operation (RS-485) with either NTM500 or NTM450.
  • I/O compatibility to PDA's.
  • Optional optical interfaces are available, including remote optics.
  • Optional remote control unit with temperature display and emissivity input.


K e y    S p e c i f i c a t i o n s
Temperature range:
PVD
HDP CVD
RTP,RTCVD

200-600 °C
250-700 °C
400-1250 °C

Other temperature ranges may be customized according to requirements.
Accuracy 500-1250°C ±0.15%T
500-1250°C ±0.15%T
Repeatability (typical)   ±0.2°C (typical)
Resolution: 0.01°C
Update rate 30 Hz (100 Hz optional)
Communication RS-232/RS-485
Dimensions 8.1" x 5.9" x 4"


Related articles

The use of temperature monitoring in advanced semiconductor industry processing (articles)
THE UT/NIST/SA/ISMT THERMOMETRY TEST BED (articles)
In-Situ calibration (articles)
THE UT/NIST/SA/ISMT THERMOMETRY TEST BED (articles)


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