NTM 450
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I n s i t u N o n - c o
n t a c t T e m p e r a t u r e M o n i t o r
The NTM450 is an advanced high accuracy and
repeatability pyrometer designed to operate as a stand-alone unit or
in conjunction with the NTM500 emissivity independent pyrometer.
The emissivity for the temperature calculation can be entered
directly from the NTM500 or via serial communication from a host
computer.
Based on the state-of-the-art technology of the
NTM500, it is a low-cost solution for in situ non-contact
temperature monitoring in PVD, HDP-CVD, RTP and other processes. The
NTM450 is a highly sensitive temperature monitor and allows
temperature measurement from below 200°C. |
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F e
a t u r e s a n d B e n e f i t s
- In situ, non-contact monitoring.
- Real-time emissivity input from external sources.
- Robust quick and vacuum-safe interface to the process chamber through quartz/sapphire light pipe and fiber optic bundle.
- Background compensation built-in solutions to fit each OEM process environment, for full immunity to interfering radiation sources such as plasma or heating elements.
- Fast update rate, enabling use for closed loop control for all applications.
- Analog and digital outputs, to fit any host interface configuration.
- High sensitivity, resulting in low minimum temperature.
- Multi-probe operation (RS-485) with either NTM500 or NTM450.
- I/O compatibility to PDA's.
- Optional optical interfaces are available, including remote optics.
- Optional remote control unit with temperature display and emissivity input.
| K e y S p e c i f i c a
t i o n s |
Temperature range:
PVD HDP CVD RTP,RTCVD
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200-600 °C 250-700 °C 400-1250
°C
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Other temperature ranges may be
customized according to requirements.
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| Accuracy |
500-1250°C ±0.15%T 500-1250°C
±0.15%T |
| Repeatability
(typical) |
±0.2°C (typical) |
| Resolution: |
0.01°C |
| Update rate |
30 Hz (100 Hz optional) |
| Communication |
RS-232/RS-485 |
| Dimensions
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8.1" x 5.9" x 4" |
Related articles
The use of temperature monitoring in advanced semiconductor industry processing (articles) THE UT/NIST/SA/ISMT THERMOMETRY TEST BED (articles) In-Situ calibration (articles) THE UT/NIST/SA/ISMT THERMOMETRY TEST BED (articles)
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