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Pyrometry

A pyrometer is a non contact sensor, providing the temperature of targets by measuring thier thermal radiation. Every object emits thermal radiation, the amount of which is a function of its temperature and emissivity. By measuring the radiation emitted by a target, such as a semiconductor wafer, its temperature can be calculated. For accurate temperature measurement, it is also required that the emissivity of the target is known – this can either be measured in real time or provided as a theoretical based input.

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