Ci-Semi


		NTM Eta
	NTM Delta
SR72
Interfaces

	WetSpec200
		WetSpec201

NTM-ETA

A d v a n c e d I n s i t u N o n - c o n t a c t T e m p e r a t u r e M o n i t o r

The NTM-ETA is an advanced high accuracy and repeatability pyrometer designed to operate as a stand-alone unit or in conjunction with the NTM-Delta emissivity independent pyrometer.
The emissivity for the temperature calculation can be entered directly from the NTM-Delta or via serial communication from a host computer

The high sensitivity and broad dynamic range of the NTM-ETA allows low minimum temperatures to be accurately measured

Based on the state-of-the-art technology of the NTM-Delta, with thousands of installations worldwide, the NTM-ETA is a reliable low-cost solution for in situ non-contact temperature monitoring in PVD, HDP-CVD, RTP and other processes.

F e a t u r e s a n d B e n e f i t s

In situ, non-contact monitoring
Real-time measurement
High sensitivity with a broad dynamic range to allow minimal temperature measurement
Small footprint
Rapid update rate (up to 3,000 Hz) for closed loop control
Advanced communication protocols including LAN, RS232 and standard analog and digital I/O
Background compensation customized to each OEM process environment
BIT (Built-In Test)
Optional optical interfaces available, including remote optics
Optional embedded PID controller
Advanced, user friendly s/w for set-up, calibration and data-logging

K e y S p e c i f i c a t i o n s
Temperature range:	Total Range 25•°C - 2,000•°C •
Different models available, optimized for specific applications
Accuracy	25°C - 500?°C: ± 0.8?°C 500?°C - 2,0500•°C - 2,000•°C: ± 0.15•%T
Repeatability	± 0.1•°C
Resolution:	0.01•°C
Update rate	Up to 3,000 Hz
Communication	RS232, Ethernet
Dimensions	213x100x46 mm (without fiber)